In this paper, we propose a highly efficient surface modification strategy on an AlGaN/GaN high electron mobility transistor (HEMT), where ethanolamine (EA) was utilized to functionalize the surface of GaN and provided amphoteric amine groups for probe molecular immobilization for bioassay application. The molecular gated-AlGaN/GaN HEMT was utilized for pH and prostate-specific antigen (PSA) detection to verify its performance as a biosensor. Benefitting from the high coating quality on the GaN surface, the performance of our biosensor is drastically improved compared to other AlGaN/GaN HEMT based pH and PSA biosensors reported before. Our molecular gated-AlGaN/GaN HEMT biosensor has achieved good static electrical performance for pH sensing, such as high sensitivity, good linearity and chemical stability. Moreover, after further immobilization of PSA antibody onto the EA aminated GaN surface, the limit of detection (LOD) for PSA detection is as low as 1 fg mL-1 in PBS buffer, which has reached an at least two orders of magnitude decrease compared to any other AlGaN/GaN HEMT based PSA biosensor reported before. And the sensitivity of our PSA biosensor has achieved a substantial increase, reaching up to 2.04% for 100 ng mL-1. The measurements of pH and PSA utilizing the EA modified AlGaN/GaN HEMT biosensor indicate that the surface modification strategy on the GaN proposed in this paper can effectively improve the performance of the AlGaN/GaN HEMT based biosensor, which demonstrates a promising application prospect in the AlGaN/GaN HEMT based biological detection field.
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