Synthesis of indium oxide microparticles using aerosol assisted chemical vapour deposition

Firoz Alam; David J Lewis

doi:10.1039/d0ra02678f

Synthesis of indium oxide microparticles using aerosol assisted chemical vapour deposition

RSC Adv. 2020 Jun 11;10(38):22487-22490. doi: 10.1039/d0ra02678f. eCollection 2020 Jun 10.

Authors

Firoz Alam^{1

2}, David J Lewis¹

Affiliations

¹ Department of Materials, The University of Manchester Oxford Road Manchester M13 9PL UK david.lewis-4@manchester.ac.uk.
² Department of Chemistry, The University of Manchester Oxford Road Manchester M13 9PL UK.

Abstract

Microparticles of indium oxide (In₂O₃) are deposited on glass substrates at 500 °C using aerosol assisted chemical vapour deposition (AACVD). The structural, morphological and optical properties of the as-deposited particles are reported.