Electromechanical phonon-cavity systems are man-made micro-structures, in which vibrational energy can be coherently transferred between different degrees of freedom. In such devices, the energy transfer direction and coupling strength can be parametrically controlled, offering great opportunities for both fundamental studies and practical applications such as phonon manipulation and sensing. However, to date the investigation of such systems has largely been limited to linear vibrations, while their responses in the nonlinear regime remain yet to be explored. Here, we demonstrate nonlinear operation of electromechanical phonon-cavity systems, and show that the resonant response differs drastically from that in the linear regime. We further demonstrate that by controlling the parametric pump, one can achieve nonlinearity-mediated digitization and amplification in the frequency domain, which can be exploited to build high-performance MEMS sensing devices based on phonon-cavity systems. Our findings offer intriguing opportunities for creating frequency-shift-based sensors and transducers.
© 2022. The Author(s).