In this paper, a polymer/silica hybrid waveguide thermo-optic variable optical attenuator (VOA), covering the O-band, is demonstrated. The switch is fabricated by simple and low-cost direct ultraviolet (UV) lithography. The multimode interferences (MMIs) used in the Mach-Zehnder interferometer (MZI)-VOA are well optimized to realize low loss and large bandwidth. The VOA shows an extinction ratio (ER) of 18.64 dB at 1310 nm, with a power consumption of 8.72 mW. The attenuation is larger than 6.99 dB over the O-band. The rise and fall time of the VOA are 184 μs and 180 μs, respectively.
Keywords: Mach–Zehnder interferometer; multimode interference; optical devices; variable optical attenuator.