Micropore filling fabrication of high resolution patterned PQDs with a pixel size less than 5 μm

Wenchao Sun; Fei Li; Jin Tao; Panyuan Li; Licai Zhu; Jiwei Li; Jinguang Lv; Weibiao Wang; Jingqiu Liang; Haizheng Zhong

doi:10.1039/d2nr01115h

Micropore filling fabrication of high resolution patterned PQDs with a pixel size less than 5 μm

Nanoscale. 2022 Apr 21;14(16):5994-5998. doi: 10.1039/d2nr01115h.

Authors

Wenchao Sun^{1

2}, Fei Li³, Jin Tao¹, Panyuan Li^{1

2}, Licai Zhu^{1

2}, Jiwei Li^{1

2}, Jinguang Lv¹, Weibiao Wang¹, Jingqiu Liang¹, Haizheng Zhong^{3

4}

Affiliations

¹ State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China. taojin@ciomp.ac.cn.
² University of Chinese Academy of Sciences, Beijing 100049, China.
³ QD LAB, Hefei Innovation Research Institute of Beihang University, Hefei, Anhui, 230001, China.
⁴ School of Materials Science and Engineering, Beijing Institute of Technology, Beijing, 100081, China. hzzhong@bit.edu.cn.

PMID: 35389395
DOI: 10.1039/d2nr01115h

Abstract

PQDs are promising color converters for micro-LED applications. Here we report the micropore filling fabrication of high resolution patterned PQDs with a pixel size of 2 μm using a template with SU8 micropores.