It is known that 2D materials can exhibit a nonflat topography, which gives rise to an inherent strain. Since local curvature and strain influence mechanical, optical, and electrical properties, but are often difficult to distinguish from each other, a robust measurement technique is needed. In this study, a novel method is introduced, which is capable of obtaining quantitative strain and topography information of 2D materials with nanometer resolution. Relying on scanning nanobeam electron diffraction (NBED), it is possible to disentangle strain from the local sample slope. Using the positions of the diffraction spots of a specimen at two different tilts to reconstruct the locations and orientations of the reciprocal lattice rods, the local strain and slope can be simultaneously retrieved. We demonstrate the differences to strain measurements from a single NBED map in theory, simulation, and experiment. MoS2 monolayers with different shapes are used as simulation test structures. The slope and height information are recovered, as well as tensile and angular strain which have an absolute difference of less than 0.2% and 0.2° from the theoretical values. An experimental proof of concept using a freely suspended WSe2 monolayer together with a discussion of the accuracy of the method is provided.
Keywords: 2D materials; NBED; monolayer; strain; topography.