Small-scale unmanned air vehicles require lightweight, compact, and low-power sensors that encompass a variety of sensing modalities to enable flight control and navigation in challenging environments. Flow sensing is one such modality that has attracted much interest in recent years. In this paper, a micro-scale artificial hair sensor is developed to resolve both the direction and magnitude of airflow. The sensor structure employs a high-aspect ratio hair structure and a thin flexible membrane to facilitate the transduction of directional airflow to membrane deflection. The sensor readout is based on capacitive sensing and two pairs of electrodes orthogonal to each other are used to obtain airflow directional information. The sensor structure was fabricated using two-photon polymerization and integration onto a miniature printed circuit board to enable simple measurement. The sensor's responses to static displacement loading from different directions were characterized. The experimental results are in good agreement with the simulation results. Furthermore, the sensor's capability to measure the direction and magnitude of flow was demonstrated. Finally, the sensor was mounted on an airfoil and its ability to detect flow separation was verified.
Keywords: 3D printed sensors; artificial hair sensor; flow sensing; flow separation sensing.
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