Two-Dimensional Platinum Diselenide Waveguide-Integrated Infrared Photodetectors

Shayan Parhizkar; Maximilian Prechtl; Anna Lena Giesecke; Stephan Suckow; Sophia Wahl; Sebastian Lukas; Oliver Hartwig; Nour Negm; Arne Quellmalz; Kristinn Gylfason; Daniel Schall; Matthias Wuttig; Georg S Duesberg; Max C Lemme

doi:10.1021/acsphotonics.1c01517

Two-Dimensional Platinum Diselenide Waveguide-Integrated Infrared Photodetectors

ACS Photonics. 2022 Mar 16;9(3):859-867. doi: 10.1021/acsphotonics.1c01517. Epub 2022 Mar 4.

Authors

Shayan Parhizkar^{1

2}, Maximilian Prechtl³, Anna Lena Giesecke², Stephan Suckow², Sophia Wahl⁴, Sebastian Lukas¹, Oliver Hartwig³, Nour Negm^{1

2}, Arne Quellmalz⁵, Kristinn Gylfason⁵, Daniel Schall^{2

6}, Matthias Wuttig⁴, Georg S Duesberg³, Max C Lemme^{1

2}

Affiliations

¹ Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany.
² AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.
³ Institute of Physics, Faculty of Electrical Engineering and Information Technology (EIT 2) and Center for Integrated Sensor Systems, University of the Bundeswehr Munich, 85577 Neubiberg, Germany.
⁴ Institute of Physics IA, RWTH Aachen University, Otto-Blumenthal-Straße, 52074 Aachen, Germany.
⁵ Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden.
⁶ Black Semiconductor GmbH, Schloss-Rahe-Straße 15, 52072 Aachen, Germany.

Abstract

Low-cost, easily integrable photodetectors (PDs) for silicon (Si) photonics are still a bottleneck for photonic-integrated circuits (PICs), especially for wavelengths above 1.8 μm. Multilayered platinum diselenide (PtSe₂) is a semi-metallic two-dimensional (2D) material that can be synthesized below 450 °C. We integrate PtSe₂-based PDs directly by conformal growth on Si waveguides. The PDs operate at 1550 nm wavelength with a maximum responsivity of 11 mA/W and response times below 8.4 μs. Fourier-transform IR spectroscopy in the wavelength range from 1.25 to 28 μm indicates the suitability of PtSe₂ for PDs far into the IR wavelength range. Our PtSe₂ PDs integrated by direct growth outperform PtSe₂ PDs manufactured by standard 2D layer transfer. The combination of IR responsivity, chemical stability, selective and conformal growth at low temperatures, and the potential for high carrier mobility makes PtSe₂ an attractive 2D material for optoelectronics and PICs.