Short bends using curved mirrors in silicon waveguides for terahertz waves

Opt Express. 2022 Feb 28;30(5):6656-6670. doi: 10.1364/OE.447268.

Abstract

Dielectric waveguides are capable of confining and guiding terahertz waves along sub-wavelength sized structures. A small feature size allows for a denser integration of different photonic components such as modulators, beam-splitters, wavelength (de)multiplexers and more. The integration of components on a small scale requires bending of the waveguides. In this paper we demonstrate a very short silicon 90°-bend, based on total internal reflection on an elliptically curved outer facet and a rounding of the inner corner joining two waveguides, with an average loss of 0.14 dB per bend in the 600-750 GHz range.