Ag-doped WO3 (Ag-WO3) films were deposited on a soda-lime glass substrate via a facile spray pyrolysis technique. The surface roughness of the films varied between 0.6 nm and 4.3 nm, as verified by the Atomic Force Microscopy (AFM) studies. Ammonia (NH3)-sensing measurements of the films were performed for various concentrations at an optimum sensor working temperature of 200 °C. Enrichment of oxygen vacancies confirmed by X-ray Photoelectron Spectroscopy (XPS) in 1% Ag-WO3 enhanced the sensor response from 1.06 to 3.29, approximately 3 times higher than that of undoped WO3. Limit of detection (LOD) up to 500 ppb is achieved for 1% Ag-WO3, substantiating the role of Ag in improving sensor performance.
Keywords: NH3 sensing; WO3 films; oxygen vacancies.