To improve the fringe contrast and the sensitivity of Fabry-Perot (FP) pressure sensors, a silicone rubber FP pressure sensor based on a spherical optical fiber end face is proposed. The ratio of silicone rubber ingredients and the diameter and thickness of silicone rubber diaphragm were optimized by a simulation based on experimental tests that analyzed elastic parameters, and the influence of the radius of a spherical optical fiber and the initial cavity length of the sensor on the fringe contrast was investigated and optimized. Pressure sensor samples were fabricated for pressure test and temperature cross-influence test. Gas pressure experimental results within a pressure range of 0~40 kPa show the average sensitivity of the sensor is -154.56 nm/kPa and repeatability error is less than 0.71%. Long-term pressure experimental results show it has good repeatability and stability. Temperature experimental results show its temperature cross-sensitivity is 0.143 kPa/°C. The good performance of the proposed FP pressure sensor will expand its applications in biochemical applications, especially in human body pressure monitoring.
Keywords: Fabry-Perot sensor; pressure; silicone rubber; spherical optical fiber.