This study demonstrated the deposition of size-controlled gold (Au) nanoclusters via direct-current magnetron sputtering and inert gas condensation techniques. The impact of different source parameters, namely, sputtering discharge power, inert gas flow rate, and aggregation length on Au nanoclusters' size and yield was investigated. Au nanoclusters' size and size uniformity were confirmed via transmission electron microscopy. In general, Au nanoclusters' average diameter increased by increasing all source parameters, producing monodispersed nanoclusters of an average size range of 1.7 ± 0.1 nm to 9.1 ± 0.1 nm. Among all source parameters, inert gas flow rate exhibited a strong impact on nanoclusters' average size, while sputtering discharge power showed great influence on Au nanoclusters' yield. Results suggest that Au nanoclusters nucleate via a three-body collision mechanism and grow through a two-body collision mechanism, wherein the nanocluster embryos grow in size due to atomic condensation. Ultimately, the usefulness of the produced Au nanoclusters as catalysts for a vapor-liquid-solid technique was put to test to synthesize the phase change material germanium telluride nanowires.
Keywords: GeTe; gold catalyst; nanoclusters; nanowires; sputtering.