We report the structure, mechanical properties, thermal stability, and durability of Si/SiC/ta-C composite (Si-ta-C) coatings fabricated using simultaneous filtered cathodic vacuum arc deposition and direct current unbalanced magnetron sputtering. Si concentration of 1.25-6.04 at.% was achieved by increasing the unbalanced magnetron sputtering power from 25 to 175 W. Si addition provided functionality to the coating, such as heat resistance, while retaining the high hardness of ta-C coatings. The Si-ta-C coatings were stable up to 600 °C regardless of the Si content, while the coating containing 3.85 at.% Si was stable up to 700 °C. The friction behavior and mechanical properties were dependent on the coating film before and after annealing at 100-200 °C; however, annealing at 300-400 °C decreased disk wear and increased counterpart wear due to an increase in film hardness on account of an endothermic reaction that increased the number of Si-C bonds. This indicates that the basic hardness characteristics of the ta-C coating and the high-temperature structural change of the Si-ta-C coating are important for ensuring high-temperature durability. These characteristics were verified through the low coefficient of friction and wear rate of the 1.25 at.% Si-ta-C coating after annealing at 500 °C.
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