Non-resonant piezoelectric linear motor with alternating normal contact force

Rev Sci Instrum. 2022 Feb 1;93(2):025007. doi: 10.1063/5.0065064.

Abstract

A non-resonant piezoelectric linear motor with alternating normal contact force is developed to realize a piezoelectric linear motor with high precision, large stroke, and strong thrust. The motor employs four piezoelectric stacks to excite the non-resonant state vibration of two driving feet, which alternately push the mover to generate unidirectional motion. Through the analysis of the working principle of the motor, the structure of the motor is designed and manufactured. The test results show the feasibility of the motor. Furthermore, the operating results show that the flatness of the contact surface strongly affects the performance of the motor. The design criteria of the motor are proposed, thus providing a basis for the optimization of the motor.