Bidirectional motion characteristics of a single harmonic-driven self-clamping linear piezoelectric motor

Rev Sci Instrum. 2022 Feb 1;93(2):025008. doi: 10.1063/5.0076407.

Abstract

We propose a multimodal model to realize the bidirectional motion of a self-clamping linear piezoelectric motor driven by a single harmonic signal based on previous motor research. Compared with the previous version, only the characteristics of the drive signal need to be changed in the motor without changing any other conditions to excite multimode and achieve reverse movement. The finite element software COMSOL5.2 was used to simulate the mode of the motor. The prototype has a maximum output speed of 71.5 mm/s, a maximum traction of 0.9 N at a voltage of 220 Vp-p, a frequency of 536 Hz, and a preload of 2 N. The minimum resolution of 26.4 µm was achieved at no-load, a voltage of 120 Vp-p, and a preload of 0 N.