Ultra-precision grinding is crucial for manufacturing high-end optics and molds, while the unbalanced wheel vibration is inevitable and becomes even more critical in surface generation, which resulted in undesired waviness and micro-texture on the ground surface. In this paper, to understand and control the micro-texture generation, a theoretical model has been developed to predict the deterministic surface micro-texture generation resulted from unbalanced tool vibration in ultra-precision grinding, in which the overlap trajectories of grinding wheel with an arc cutting edge were analyzed and calculated. The simulation work was performed and a double phase mechanism involved in deterministic textural pattern and structure has been revealed. Both theoretical and experimental results proved that phase shift is an important factor to determine micro-texture evolution in the ultra-precision grinding process. On this basis, a novel tool path strategy has been proposed to fabricate deterministic micro-structure by coordinating oscillation motion of the grinding wheel and phase shift control, in which a rhombus-shaped micro-structure array can be generated. A small adjustment for the phase shift was conducted and it was found that the more complex micro-texture with different textural patterns and micro-structure can be machined. The results indicated that the phase control for the tool path planning is an effective method to fabricate flexible and tunable micro-texture surfaces in ultra-precision grinding.