This paper introduces the working principle of a MEMS safety and arming (S&A) device for a fuze that is installed perpendicular to the axis of the projectile. Additionally, the application of low-speed wire electrical discharge machining (EDM) in the fabrication of the device is proposed. Microsprings are susceptible to flexural deformation and secondary deformation in the EDM process, a problem that is solved by designing the auxiliary support beam, using multiple cuts, destress annealing and optimizing the processing parameters. The difficult problem of setback slider deformation in the principle prototype test is properly solved by establishing V-shaped grooves at both ends of the setback slider. The connection mode between the microspring and the frame is changed to a clearance fit connection. The improved setback arming device can guarantee service process safety and launch reliability. The maximum overload that can be withstood in service processing is 20,000 g, and the minimum overload for safety release during launch is 12,000 g. The results show that the EDM process can greatly reduce the machining cost while improving the machining precision and machining speed, which can compensate for the defects of the current manufacturing technology.
Keywords: EDM process; MEMS S&A device; fuze; microspring; setback slider.