Air microfluidic circuits have been widely concerned in the separation of atmospheric particulate matter, especially for portable particulate matter separation detection devices. Currently, no systematic approach for the design and optimization of an air-microfluidic system for PM separation has been reported in the literature. In this paper, a two-stage air microfluidic circuit is designed. The design process is divided into two stages: first, the preliminary design of the structure is completed according to aerodynamic theory. Then, the influences of various factors (such as flow channel width, tilt angle, flow rate, etc.) on the collection efficiency and particle wall loss are explored through numerical analysis to complete the optimization design of the structure. Finally, the air microfluidic circuit is prepared by MEMS processing technology and the particulate matter separation experiments are carried out. The developed two-stage air microfluidic circuit can realize the efficient separation of PM10 and PM2.5. Thus, the important factors affecting the collection efficiency and particle wall loss of air microfluidic circuit are clarified, and a systematic design theory method is formed.
Keywords: air microfluidic circuit; collection efficiency; particle wall loss; particulate matter.