High anti-interference dual-parameter sensor using an EIT-like effect photonic crystal cavity coupled system

Appl Opt. 2022 Feb 20;61(6):1552-1558. doi: 10.1364/AO.452140.

Abstract

We propose a sensor with high anti-interference ability using a photonic crystal cavity coupled system for simultaneous sensing of the refractive index (RI) and temperature (T) based on an electromagnetically induced transparency-like effect. A transparent window is achieved in the transmission spectrum through destructive interference between the air mode resonance and dielectric mode resonance in two one-dimensional photonic crystal structures. The T-sensitive material (SU-8) is used in the coupled system, promoting sensitivity and anti-interference ability. The capability of the system to simultaneously detect a small range of RI and T is demonstrated using three-dimensional finite-difference time-domain simulations and the fitting process. The RI sensitivities for the air and dielectric modes were 215 nm/refractive index unit (RIU) and 0 nm/RIU, respectively. The T sensitivities for the air and dielectric modes were 19 pm/K and -83pm/K, respectively. The sensor resists external interference, enabling it to resist the error caused by readings. The footprint of the sensor is 29×1.8µm2 (length×width), contributing to future optical on-chip integration sensor design.