By using the temperature dependence of viscosity, we introduce a novel type of microfluidic lab-on-a-chip back pressure regulator (BPR) that can be integrated into a micro-total-analysis-system. A BPR is an important component used to gain pressure control and maintain elevated pressures in e.g. chemical extractions, synthesis, and analyses. Such applications have been limited in microfluidics, since the back pressure regularly has been attained by passive restrictors or external large-scale BPRs. Herein, an active microfluidic BPR is presented, consisting of a glass chip with integrated thin-film heaters and thermal sensors. It has no moving parts but a fluid restrictor where the flow resistance is controlled by the change of viscosity with temperature. Performance was evaluated by regulating the upstream pressure of methanol or water using a PID controller. The developed BPR has the smallest reported dead volume of 3 nL and the thermal actuation has time constants of a few seconds. The pressure regulation were reproducible with a precision in the millibar range, limited by the pressure sensor. The time constant of the pressure changes was evaluated and its dependence of the total upstream volume and the compressibility of the liquids is introduced.
© 2022. The Author(s).