Regenerated silk fibroin (RSF) has been regarded as a very promising biomaterial for the preparation of microfluidic devices. However, the facile and low-cost fabrication of three-dimensional (3D) RSF microfluidic devices is still a great challenge. Herein, we developed a tape-mask-assisted multiple-step etching technique to fabricate 3D microfluidic devices based on water-annealed RSF films. Several rounds of tape adhesion- or peeling-etching cycles need to be conducted to produce 3D features on the RSF films with the LiBr aqueous solution as the etchant. The water-annealed RSF films could be effectively etched with 1.0 g·mL-1 LiBr solution at 60 °C. The shape, width, and height of the 3D structures could be precisely tailored by controlling the mask pattern, etching conditions, and the number of etchings. Using the tape adhesion- and peeling-assisted multiple-etching techniques, the convex-pyramid-shaped and the concave-step-shaped structures could be successfully prepared on the RSF films, respectively. The RSF-film-based 3D micromixers and microfluidic separator were also manufactured with the proposed approach, exhibiting excellent liquid mixing and size-dependent particle sorting capabilities, respectively. The enzymatic degradation of RSF-film-based devices was also investigated to show their environmental friendliness. This work may not only provide a facile and low-cost method for the fabrication of RSF-based 3D microfluidic devices but also extend the applications of RSF in the fields of biomedical and chemical analysis.
Keywords: 3D microfluidic devices; microfabrication; microfluidic separator; micromixer; silk fibroin.