Thermal transport in beta-gallium oxide thin-films using non-gray Boltzmann transport equation

J Phys Condens Matter. 2021 Dec 24;34(10). doi: 10.1088/1361-648X/ac413e.

Abstract

Phonon transport inβ-Ga2O3thin films and metal-oxide field effect transistors (MESFETs) are investigated using non-gray Boltzmann transport equations (BTEs) to decipher the effect of ballistic-diffusive phonon transport. The effects of domain size, and energy dissipation to various phonon modes and subsequent phonon-phonon energy exchange on the thermal transport and temperature distribution is investigated using non-gray BTE. Our analysis deciphered that domain size plays a major role in thermal transport inβ-Ga2O3but energy dissipation to various phonon modes and subsequent phonon-phonon energy exchange does not affect the temperature field significantly. Phonon transport inβ-Ga2O3MESFETs on diamond substrate is investigated using coupled non-gray BTE and Fourier model. It is established that the ballistic effects need to be considered for devices withβ-Ga2O3layer thickness less than 1 μm. A non-gray phonon BTE model should be used near hotspot in the thinβ-Ga2O3layer as the Fourier model may not give accurate temperature distribution. The results from this work will help in understanding the mechanism of phonon transport in theβ-Ga2O3thin films and energy efficient design of its FETs.

Keywords: field effect transistors (FETs); non-gray Boltzmann transport equation (BTE); phonon transport; thermal transport; wide bandgap materials; β-Ga2O3.