Research on sound power measurement of multi-element ultrasonic focusing transducer based on cross-spectrum method

Rev Sci Instrum. 2021 Nov 1;92(11):115105. doi: 10.1063/5.0058865.

Abstract

In this paper, aiming at the problem that a multi-array focused ultrasonic transducer working in a high power range has a nonlinear influence on the measurement accuracy, a study of acoustic power measurement based on the near field cross-spectrum method was carried out. The focused acoustic field of a multi-array transducer was derived theoretically by combining the cross-spectrum method and the Westervelt nonlinear acoustic propagation equation. Finite element simulation was used to establish the model of the focused sound field of the multi-array transducer under different excitation conditions, and the influence law of each harmonic on the total sound power under specific excitation conditions was obtained. A cross-spectrum measurement system was built to scan the two near focusing planes under different excitation conditions. The total energy, each harmonic energy, and their proportion in the focusing region under the corresponding excitation were obtained through calculation and processing. The theoretical and simulation results were verified, and the harmonic energies were compensated in the calculation of the total ultrasonic power. The measurement results were compared with those obtained by radiation force balances. It was found that the maximum measurement deviation of compensated ultrasonic power was 7.89%, which met the requirements of acoustic measurement. The accuracy of the method and conclusion was verified under the power range of 10-60 W.