Integration of a Metal-Organic Framework Film with a Tubular Whispering-Gallery-Mode Microcavity for Effective CO2 Sensing

Ye Kong; Zhe Zhao; Yunqi Wang; Shuo Yang; Gaoshan Huang; Yang Wang; Chang Liu; Chunyu You; Ji Tan; Chao Wang; Borui Xu; Jizhai Cui; Xuanyong Liu; Yongfeng Mei

doi:10.1021/acsami.1c16322

Integration of a Metal-Organic Framework Film with a Tubular Whispering-Gallery-Mode Microcavity for Effective CO₂ Sensing

ACS Appl Mater Interfaces. 2021 Dec 8;13(48):58104-58113. doi: 10.1021/acsami.1c16322. Epub 2021 Nov 22.

Authors

Ye Kong^{1

2}, Zhe Zhao^{1

2}, Yunqi Wang^{1

2}, Shuo Yang^{1

2}, Gaoshan Huang^{1

2

3}, Yang Wang^{1

2}, Chang Liu^{1

2}, Chunyu You^{1

2}, Ji Tan⁴, Chao Wang¹, Borui Xu^{1

5

3}, Jizhai Cui^{1

2

3}, Xuanyong Liu⁴, Yongfeng Mei^{1

2

5

3}

Affiliations

¹ Department of Materials Science, Fudan University, Shanghai 200433, P. R. China.
² International Institute for Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, P. R. China.
³ Yiwu Research Institute of Fudan University, Yiwu 322000, Zhejiang, P. R. China.
⁴ State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, P. R. China.
⁵ Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, P. R. China.

PMID: 34809420
DOI: 10.1021/acsami.1c16322

Abstract

Carbon dioxide (CO₂) sensing using an optical technique is of great importance in the environment and industrial emission monitoring. However, limited by the poor specific adsorption of gas molecules as well as insufficient coupling efficiency, there is still a long way to go toward realizing a highly sensitive optical CO₂ gas sensor. Herein, by combining the advantages of a whispering-gallery-mode microcavity and a metal-organic framework (MOF) film, a porous functional microcavity (PF-MC) was fabricated with the assistance of the atomic layer deposition technique and was applied to CO₂ sensing. In this functional composite, the rolled-up microcavity provides the ability to tune the propagation of light waves and the electromagnetic coupling with the surroundings via an evanescent field, while the nanoporous MOF film contributes to the specific adsorption of CO₂. The composite demonstrates a high sensitivity of 188 nm RIU^-1 (7.4 pm/% with respect to the CO₂ concentration) and a low detection limit of ∼5.85 × 10^-5 RIU. Furthermore, the PF-MC exhibits great selectivity to CO₂ and outstanding reproducibility, which is promising for the next-generation optical gas sensing devices.

Keywords: carbon dioxide sensor; evanescent coupling; metal−organic framework; nanoporous; optical microcavity.