In this paper, a very high sensitivity microwave-based planar microfluidic sensor is presented. Sensitivity enhancement is achieved and described theoretically and experimentally by eliminating any extra parasitic capacitance not contributing to the sensing mechanism. The sensor consists of a microstrip transmission line loaded with a series connected shunt LC resonator. A microfluidic channel is attached to the area of the highest electric field concentration. The electric field distribution and, therefore, the resonance characteristics are modified by applying microfluidic dielectric samples to the sensing area. The sensor performance and working principle are described through a circuit model analysis. A device prototype is fabricated, and experimental measurements using water/ethanol and water/methanol solutions are presented for validation of the sensing mathematical model.
Keywords: dielectric measurement; microfluidic sensor; microwave sensor; planar resonators.