Elliptical vibration-assisted cutting technology has been widely applied in complicated functional micro-structured surface texturing. Elliptical-arc-beam spherical flexure hinges have promising applications in the design of 3D elliptical vibration-assisted cutting mechanisms due to their high motion accuracy and large motion ranges. Analytical compliance matrix formulation of flexure hinges is the basis for achieving high-precision positioning performance of these mechanisms, but few studies focus on this topic. In this paper, analytical compliance equations of spatial elliptic-arc-beam spherical flexure hinges are derived, offering a convenient tool for analysis at early stages of mechanism design. The mechanical model of a generalized flexure hinge is firstly established based on Castigliano's Second Theorem. By introducing the eccentric angle as the integral variable, the compliance matrix of the elliptical-arc-beam spherical flexure hinge is formulated. Finite element analysis is carried out to verify the accuracy of the derived analytical compliance matrix. The compliance factors calculated by the analytical equations agree well with those solved in the finite element analysis for the maximum error; average relative error and relative standard deviation are 8.25%, 1.83% and 1.78%, respectively. This work lays the foundations for the design and modeling of 3D elliptical vibration-assisted cutting mechanisms based on elliptical-arc-beam spherical flexure hinges.
Keywords: compliance equations; high-precision positioning mechanism design; mechanical modeling; spherical flexure hinges.