Batch Manufacturing of Split-Actuator Micro Air Vehicle Based on Monolithic Processing Technology

Micromachines (Basel). 2021 Oct 18;12(10):1270. doi: 10.3390/mi12101270.

Abstract

Microrobots have a wide range of applications. The rigid-flexible composite stereoscopic technology based on ultraviolet laser cutting technology is primarily researched for the design and manufacture of microrobots and has been used to fabricate microscale motion mechanisms and robots. This paper introduces a monolithic processing technology based on the rigid-flexible composite stereoscopic process. Based on this process, a split-actuator micro flapping-wing air vehicle with a size of 15 mm × 2.5 mm × 30 mm was designed. We proposed a batch manufacturing method capable of processing multiple micro air vehicles at the same time. The main structure of 22 flapping-wing micro air vehicles can be processed at the same time within the processing range of the composite sheet with an area of 80 mm × 80 mm, and the processing effect is good.

Keywords: air vehicle; batch manufacture; flapping-wing; microrobots; monolithic process.