This paper presents a micro-electromechanical systems (MEMS)-based integrated triaxial electrochemical seismometer, which can detect three-dimensional vibration. By integrating three axes, the integrated triaxial electrochemical seismometer is characterized by small volume and high symmetry. The numerical simulation results inferred that the integrated triaxial electrochemical seismometer had excellent independence among three axes. Based on the experimental results, the integrated triaxial electrochemical seismometer had the advantage of small axial crosstalk and could detect vibration in arbitrary directions. Furthermore, compared with the uniaxial electrochemical seismometer, the integrated triaxial electrochemical seismometer had similar sensitivity curves ranging from 0.01 to 100 Hz. In terms of random ground motion response, high consistencies between the developed integrated triaxial electrochemical seismometer and the uniaxial electrochemical seismometer could be easily observed, which indicated that the developed integrated triaxial electrochemical seismometer produced comparable noise levels to those of the uniaxial electrochemical seismometer. These results validated the performance of the integrated triaxial electrochemical seismometer, which has a good prospect in the field of deep geophysical exploration and submarine seismic monitoring.
Keywords: electrochemical seismometer; integrated triaxial; micro-electro-mechanical system.