Quasi-Guided Modes in Titanium Dioxide Arrays Fabricated via Soft Nanoimprint Lithography

ACS Appl Mater Interfaces. 2021 Oct 13;13(40):47860-47870. doi: 10.1021/acsami.1c11456. Epub 2021 Sep 30.

Abstract

Reversible quasi-guided modes (QGMs) are observed in titanium dioxide (TiO2) metasurface arrays fabricated via soft nanoimprint lithography. A TiO2 layer between the nanopillar array and the substrate can facilitate the propagation of QGMs. This layer is porous, allowing for the tuning of the layer properties by incorporating another material. The presence of the QGMs is strongly dependent on the refractive index of the TiO2 layer. QGMs are not supported if the refractive index of the porous TiO2 is too low. It is demonstrated that after depositing R6G on the array QGMs can be observed as very strong and narrow reflectance peaks and transmittance dips. Furthermore, as the second material can penetrate through the pores into the layer it can experience the regions of high field enhancement associated with the QGMs. These results are of interest for a wide range of applications including but not limited to sensing, nonlinear optics, and emission control.

Keywords: dielectric nanoresonator; metasurfaces; nanoarrays; nanoimprint lithography; quasi-guided modes; titanium dioxide.