In order to enhance the sensitivity of a Fabry-Perot (F-P) acoustic sensor without the need of fabricating complicated structures of the acoustic-sensitive diaphragm, a mini-type external sound pressure amplification structure (SPAS) with double 10 μm thickness E-shaped diaphragms of different sizes interconnected with a 5 mm length tapered circular rod was developed based on the acoustic sensitive mechanism of the ossicular chain in the human middle ear. The influence of thickness and Young's modulus of the two diaphragms with the diameters of 15 mm and 3 mm, respectively, on the amplification ratio and frequency response were investigated via COMSOL acoustic field simulation, thereby confirming the dominated effect. Then, three kinds of dual-diaphragm schemes relating to steel and thermoplastic polyurethanes (TPU) materials were introduced to fabricate the corresponding SPASs. The acoustic test showed that the first scheme achieved a high resonant response frequency with lower acoustic amplification due to strong equivalent stiffness; in contrast, the second scheme offered a high acoustic amplification but reduced frequency range. As a result of sensitivity enhancement, adapted with the steel/TPU diaphragm structure, an optical fiber Fabry-Perot sensor using a multilayer graphene diaphragm with a diameter of 125 μm demonstrated a remarkable sensitivity of 565.3 mV/Pa @1.2 kHz due to the amplification ratio of up to ~29.9 in the range of 0.2-2.3 kHz, which can be further improved by miniaturizing structure dimension, along with the use of microstructure packaging technology.
Keywords: Fabry–Perot sensor; double diaphragm scheme; graphene diaphragm; sensitivity enhancement; sound pressure amplification structure.