The polycrystalline diamonds were synthesized on n-type single crystalline Si wafer by Hot Filament CVD method. The structural properties of the obtained diamond films were checked by X-ray diffraction and Raman spectroscopy. The conductivity of n-Si/p-diamond, sandwiched between two electrodes, was measured in the temperature range of 90-300 K in a closed cycle cryostat under vacuum. In the temperature range of (200-300 K), the experimental data of the conductivity were used to obtain the activation energies Ea which comes out to be in the range of 60-228 meV. In the low temperature region i.e., below 200 K, the conductivity increases very slowly with temperature, which indicates that the conduction occurs via Mott variable range hopping in the localized states near Fermi level. The densities of localized states in diamond films were calculated using Mott's model and were found to be in the range of 9×1013 to 5×1014eV-1cm-3 depending on the diamond's surface hydrogenation level. The Mott's model allowed estimating primal parameters like average hopping range and hopping energy. It has been shown that the surface hydrogenation may play a crucial role in tuning transport properties.
Keywords: HF CVD; Raman spectroscopy; XRD; dc-conductivity; diamond films; hydrogenation impact.