1 State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai, 200433, China.
2 Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai, 200433, China.
3 Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China.
4 National Institute of Metrology, Beijing, 100029, China.
5 Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China.
6 State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai, 200433, China. lshi@fudan.edu.cn.
7 Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai, 200433, China. lshi@fudan.edu.cn.
8 Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China. lshi@fudan.edu.cn.
9 State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai, 200433, China. jzi@fudan.edu.cn.
10 Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China. jzi@fudan.edu.cn.