This paper describes a silicon/glass sensing structure for axial angle measurements. The presented optical angular sensor can statically measure the angle φ of any apparatus depending on the torsion of the optical component against the sensor housing. Core element of the sensor is an optical medium with an etched structure, which diffracts light from an LED according to the Fresnel equation. Two photodiodes, one for angle determination and one as reference, conduct the measurement. Hence, the signal splits up into two parts: one part transmits trough the optical system and the second part (the reflected wave) is used as reference signal. For self-referencing purposes, the wavelength spectrum of the LED has its maximum in the infrared regime near to the wavelength where silicon gets transparent (l~1000 nm). More precisely, torsion angle and light intensity show a dependency given by Tstot if a straight etching structure (refraction profile) is used. To avoid multiple reflections of light, a coating layer restricts the illuminated area in the optical medium. With this setting a resolution of 0.05-degree rotation angle has been achieved and by stacking the construction, the sensor can measure an angular range from 30° up to 270°.
Keywords: Si-based-sensor; angular sensor; optical sensor; self-referencing.