Tailored intensity profiles within the focal spot of the laser beam offer great potential for a well-defined control of the interaction process between laser radiation and material, and thus for improving the processing results. The present paper discusses a novel refractive beam-shaping element that provides different squared intensity distributions converted from the Gaussian output beam of the utilized femtosecond (fs) laser. Using the examples of surface structuring of stainless-steel on the micro- and nano-scale, the suitability of the beam-shaping element for fs-laser material processing with a conventional f-Theta lens is demonstrated. In this context, it was shown that the experimental structuring results are in good agreement with beam profile measurements and numerical simulations of the beam-shaping unit. In addition, the experimental results reveal the improvement of laser processing in terms of a significantly reduced processing time during surface nano-structuring and the possibility to control the ablation geometry during the fabrication of micro-channels.
Keywords: beam shaping; fs-laser; laser surface structuring; laser-induced periodic surface structures; micro-channels; squared top-hat.