The Effect of Annealing Temperatures on Selected Properties of WC/C Coatings, Deposited Using Hexacarbonyl Wolfram in an N2-SiH4 Atmosphere

Peter Horňák; Daniel Kottfer; Karol Kyzioł; Marianna Trebuňová; Mária Kaňuchová; Lukasz Kaczmarek; Jozef Jasenák; Ján Hašuľ; Lukáš Rusinko

doi:10.3390/ma14164658

The Effect of Annealing Temperatures on Selected Properties of WC/C Coatings, Deposited Using Hexacarbonyl Wolfram in an N₂-SiH₄ Atmosphere

Materials (Basel). 2021 Aug 18;14(16):4658. doi: 10.3390/ma14164658.

Authors

Peter Horňák^{1

2}, Daniel Kottfer³, Karol Kyzioł⁴, Marianna Trebuňová⁵, Mária Kaňuchová⁶, Lukasz Kaczmarek⁷, Jozef Jasenák³, Ján Hašuľ⁸, Lukáš Rusinko⁸

Affiliations

¹ Department of Materials Science, Faculty of Industrial Technologies, Alexander Dubček University of Trenčín, I. Krasku 491/30, 020 01 Púchov, Slovakia.
² Slovak Academy of Sciences, Institute of Materials Research, Watsonova 47, 040 01 Košice, Slovakia.
³ Department of Mechanical Technologies and Materials, Faculty of Special Technology, Alexander Dubček University of Trenčín, Ku Kyselke 469, 911 06 Trenčín, Slovakia.
⁴ Faculty of Materials Science and Ceramics, AGH University of Science and Technology, A. Mickiewicza 30 Av., 30-059 Kraków, Poland.
⁵ Department of Biomedical Engineering and Measurement, Faculty of Mechanical Engineering, Technical University of Košice, Letná 9, 042 00 Košice, Slovakia.
⁶ Process Control and Geotechnology, e Institute of Mountainous Sciences and Environmental Protection, Faculty of Mining, Ecology, Technical University of Košice, Park Komenskeho 19, 043 84 Košice, Slovakia.
⁷ Institute of Materials Science and Engineering, Lodz University of Technology, 1/15 Stefanowskiego Str., 90-924 Łódź, Poland.
⁸ Department of Technologies, Materials and Computer Aided Production, Faculty of Mechanical Engineering, Technical University of Košice, Mäsiarska 74, 040 01 Košice, Slovakia.

Abstract

In this paper, we present the results of an experimental study on WC/C coatings, deposited by using plasma-enhanced chemical vapor deposition in an N₂-SiH₄ atmosphere, annealed at temperatures of 200, 500 and 800 °C, in which the hexacarbonyl of W was used as a precursor. During the experiments, the topography, chemical composition, morphology, as well as selected mechanical properties, such as hardness, Young's modulus, and coefficient of friction of the WC/C coatings were analyzed. Annealing without the protective atmosphere in the mentioned temperatures caused a decrease in hardness (up to 15 ± 2.7 GPa). In addition, the coefficient of friction value increased only to 0.37 ± 0.03.

Keywords: WC/C coating; annealing; hexacarbonyl wolfram; plasma; plasma enhanced chemical vapor deposition; surface properties.

Abstract

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