Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing

Rosa Córdoba

doi:10.3390/mi12080893

Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing

Micromachines (Basel). 2021 Jul 28;12(8):893. doi: 10.3390/mi12080893.

Author

Rosa Córdoba¹

Affiliation

¹ Institute of Molecular Science (ICMol), University of Valencia, 46980 Paterna, Spain.

Abstract

Focused electron beam (FEB) and focused ion beam (FIB) technologies have opened novel paths for material science research and technology at the micro and nano scales in recent decades [...].

Publication types

Editorial