Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Liqun Wu; Jianlong Chen; Linan Zhang; Hongcheng Wang; Chao Chen

doi:10.3390/mi12050528

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Micromachines (Basel). 2021 May 7;12(5):528. doi: 10.3390/mi12050528.

Authors

Liqun Wu¹, Jianlong Chen¹, Linan Zhang¹, Hongcheng Wang¹, Chao Chen²

Affiliations

¹ School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
² School of Information and Electronic Engineering, Zhejiang Gongshang University, Hangzhou 310018, China.

Abstract

This work proposes a detailed process of micro/nano-structure surface modification in relation to temperature field. In this paper, a femtosecond laser is used to induce the surface morphology of a silicon substrate. We provide a new method for the fabrication of a micro/nano-cantilever probe by controlling the aspect ratio of the silicon surface morphology. A computational method is used to investigate the mechanical behaviors of early perturbation to late-stage structure. A diffuse interface model is employed to describe the evolution and provide a general framework. The theoretical model of femtosecond laser control surface morphology is verified by the experiments. For systematic study, the model involves the interface energy and kinetics of diffusion. This method provides an effective way to improve the sensitivity of micro/nano-cantilever sensors.

Keywords: diffuse interface model; micro/nano-cantilever sensor; micro/nano-structures; temperature field.