Motion capture of a robot and tactile sensing for a robot require sensors. Strain sensors are used to detect bending deformation of the robot finger and to sense the force from an object. It is important to introduce sensors in effective combination with actuators without affecting the original performance of the robot. We are interested in the improvement of flexible strain sensors integrated into soft microrobot fingers using a pneumatic balloon actuator (PBA). A strain sensor using a microchannel filled with liquid metal was developed for soft PBAs by considering the compatibility of sensors and actuators. Inflatable deformation generated by PBAs, however, was found to affect sensor characteristics. This paper presents structural reinforcement of a liquid metal-based sensor to solve this problem. Parylene C film was deposited into a microchannel to reinforce its structure against the inflatable deformation caused by a PBA. Parylene C deposition into a microchannel suppressed the interference of inflatable deformation. The proposed method enables the effective combination of soft PBAs and a flexible liquid metal strain sensor for use in microrobot fingers.
Keywords: flexible; inflatable deformation; integration; liquid metal; microchannel; parylene C; pneumatic balloon actuator; soft; strain sensor.