Correction of resonant optical scanner dynamic aberrations using nodal aberration theory

Opt Express. 2021 Mar 29;29(7):10346-10363. doi: 10.1364/OE.414405.

Abstract

The rapid oscillation of galvanometric resonant optical scanners introduces linear astigmatism that degrades transverse resolution, and in confocal systems, also reduces signal [V. Akondi et al., Optica 7, 1506, 2020]. Here, we demonstrate correction of this aberration by tilting reflective or refractive optical elements for a single vergence or a vergence range, with and without the use of an adaptive wavefront corrector such as a deformable mirror. The approach, based on nodal aberration theory, can generate any desired third order aberration that results from tilting or decentering optical surfaces.