All-sapphire-based fiber-optic pressure sensor for high-temperature applications based on wet etching

Zhiqiang Shao; Yalin Wu; Shuang Wang; Chaozhu Zhang; Zhiqiang Sun; Meiyu Yan; Yingqi Shang; Erdong Song; Zhiyuan Liu

doi:10.1364/OE.417246

All-sapphire-based fiber-optic pressure sensor for high-temperature applications based on wet etching

Opt Express. 2021 Feb 1;29(3):4139-4146. doi: 10.1364/OE.417246.

Authors

Zhiqiang Shao, Yalin Wu, Shuang Wang, Chaozhu Zhang, Zhiqiang Sun, Meiyu Yan, Yingqi Shang, Erdong Song, Zhiyuan Liu

PMID: 33770999
DOI: 10.1364/OE.417246

Abstract

In this paper, we proposed an all-sapphire-based extrinsic Fabry-Perot interferometer (EFPI) pressure sensor based on an optimized wet etching process, aiming to improve the quality of the interference signal. The sapphire pressure sensitive diaphragm (SPSD) was fabricated by wet etching solutions with different mixture ratios of H₃PO₄ and H₂SO₄ at 280°C. The differences of mixture ratios affect the surface roughness of SPSD. SPSDs with surface roughness of 3.91nm and 0.39nm are obtained when the mixture ratios of H₃PO₄ and H₂SO₄ is 1:1 and 1:3, respectively. We constructed pressure sensing test system adopting these two kinds of SPSD and performed comparative test. The experiment results show that the demodulation jump can be solved and cavity length fluctuation is decreased to ±5nm when the surface roughness of SPSD is 0.39nm.