Design of a Capacitorless Dynamic Random Access Memory Based on Ultra-Thin Polycrystalline Silicon Junctionless Field-Effect Transistor with Dual-Gate

J Nanosci Nanotechnol. 2021 Aug 1;21(8):4223-4229. doi: 10.1166/jnn.2021.19386.

Abstract

In this paper, a 1T-DRAM based on the junctionless field-effect transistor (JLFET) with an ultrathin polycrystalline silicon layer was designed and investigated by using technology computer-aided design simulation (TCAD). The application of a negative voltage at the control gate results in the generation of holes in the storage region by the band-to-band tunneling (BTBT) effect. Memory characteristics such as sensing margin and retention time are affected by the doping concentration of the storage region, bias condition of the program, and length of the intrinsic region. In addition, the gate acts as a switch that controls the transfer characteristics while the control gate plays a role in retaining holes in the hold state. The device was optimized, considering various parameters such as the doping concentration of the storage region (Nstorage), intrinsic region length (Lint), and operation bias conditions to obtain a high sensing margin of 49.7 μA/μm and a long retention time of 2 s even at a high temperature of 358 K. The obtained retention time is almost 30 times longer than that predicted for modern DRAM cells by the International technology roadmap for semiconductors (ITRS).

Publication types

  • Research Support, Non-U.S. Gov't