Nanopatterning of monolayer graphene by quantum optical lithography

Appl Opt. 2021 Feb 20;60(6):1674-1677. doi: 10.1364/AO.419831.

Abstract

Quantum optical lithography, a diffraction-unlimited method, was applied to pattern monolayer graphene at 10 nm resolution. In our tests with chemical vapor deposition monolayer graphene samples, we have succeeded in producing flat surfaces of a sandwich of monolayer graphene-resist on Si, Si3N4, or glass substrates. Complex patterns have been written on monolayer graphene samples by a nanoablation process. The method could be used to realize monolayer graphene nanodevices.