In this paper, the key technology of interferometric microwave thermometer is studied, the research can be applied to the temperature measurement of human body and subcutaneous tissue. This paper proposes a hardware architecture of interferometric microwave thermometer with 2 GHz bandwidth, in which the phase shifter is used to correct phase error and the quadrature demodulator is used to realize autocorrelation detection function. The results show that when input power is 7 dBm, the detection sensitivity can reach 176.54 mV/dBm and the temperature resolution of the microwave radiometer can reach 0.4 K. Correction algorithm is designed to improve the accuracy of temperature measurement. After correction, the phase error is reduced from 40° to 1.4° and when temperature changes 0.1 °C, the voltage value changes obviously. Step-by-step calibration and overall calibration are used to calibrate the device. Inversion algorithm can determine the relationship between physical temperature and output voltage. The mean square error of water temperature inversion by multiple linear regression algorithm is 0.607 and that of BP neural network algorithm is 0.334. The inversion accuracy can be improved by reducing the temperature range. Our work provides a promising realization of accurate, rapid and non-contact detection device of human body temperature.
Keywords: calibration; correction algorithm; interferometric; inversion algorithm; microwave radiometer; neural network.