Systematic analysis of the surface morphology, crystalline phase, chemical composition and elemental distribution along depth for nitrogen-doped niobium was carried out using different methods of characterization, including Scanning Electron Microscopy (SEM), Atomic-Force Microscopy (AFM), Grazing Incidence X-ray Diffraction (GIXRD), Rutherford Backscattering Spectrometry (RBS) and layer-by-layer X-ray Photoelectron Spectroscopy (XPS) analysis. The results showed that, after nitrogen doping, the surface was covered by densely distributed trigonal precipitates with an average crystallite size of 32 ± 8 nm, in line with the calculation result (29.9 nm) of nitrogen-enrichedβ-Nb2N from GIXRD, demonstrating the phase composition of trigonal precipitates. The depth analysis through RBS and XPS indicated thatβ-Nb2N was dominant in the topmost 9.7 nm and extended to a depth of 575 nm, with gradually decreased content. In addition, the successive change along depth in the naturally oxidized states of niobium after nitrogen doping, was revealed. It was interesting to find that the oxygen diffusion depth could be moderately enhanced by the nitridation process. These results established the near-surface phase composition of nitrided niobium, which is of great significance in evaluating the effect of nitrogen doping and further understanding the Q improvement of the superconducting radio frequency cavities.
Keywords: depth profiling; niobium; nitrogen doping; superconducting accelerator; trigonal precipitates.
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