Microfluidic ratio metering devices fabricated in PMMA by CO2 laser

Microsyst Technol. 2021;27(1):47-58. doi: 10.1007/s00542-020-04902-w. Epub 2020 Jun 1.

Abstract

We describe microfluidic fabrication results achieved using a 10.6 μm CO2 engraving laser on cast PMMA, in both raster and vector mode, with a 1.5″ lens and a High Power Density Focussing Optics lens. Raster written channels show a flatter base and are more U-shaped, while vector written channels are V shaped. Cross-sectional images, and, where possible, stylus profilometry results are presented. The sides of V-grooves become increasing steep with laser power, but broader shallower channels may be produced in vector mode by laser defocus, as illustrated. Smoothing of raster engraved channels by heated IPA etch, and transparency enhancement by CHCl3 vapour treatment are briefly discussed. An asymmetric Y meter is discussed as one method of diluting acid into seawater for dissolved CO2 analysis. Alternatively, microfluidic snake channel restrictors of different lengths in 2 channels may achieve the same result. Samples are fabricated with bases bonded by CHCl3 vapour treatment, and the devices are flow tested with either dilute food dye or DI water. Microfluidics fabricated in this manner have applications in ocean sensing of dissolved CO2 and other analytes, as well as broader sensing measurements, including biomedical sensors.