The design, micro-fabrication, and characterization of a resistance temperature detector (RTD) based micro sensor for minimally invasive breathing analysis and monitoring is presented. Experimental results demonstrate that the change in air temperature while inhaling and exhaling can be transduced into a time varying electrical signal, which is subsequently used to determine the breathing frequency (respiratory rate). The RTD is placed into a Wheatstone bridge to simultaneously reduce the sensor's output noise and improve overall system accuracy. The proposed design could potentially aid health care providers in the determination of respiratory rates, which is of critical importance during the current COVID-19 pandemic.
Keywords: bridge circuits; frequency measurement; micro-fabrication; respiratory rate; temperature sensors; thermal resistance; wearable sensors.