By combining results of adsorption/desorption measurements on powders and electrical conductivity studies on thick and thin films, the interaction of indium tin oxide with various ambient gas species and carbon monoxide as potential target gas was studied between room temperature and 700 °C. The results show that the indium tin oxide surfaces exhibit a significant coverage of water-related and carbonaceous adsorbates even at temperatures as high as 600 °C. Specifically carbonaceous species, which are also produced under carbon monoxide exposure, show a detrimental effect on oxygen adsorption and may impair the film's sensitivity to a variety of target gases if the material is used in gas sensing applications. Consequently, the operating temperature of an ITO based chemoresistive carbon monoxide sensor should be selected within a range where the decomposition and desorption of these species proceeds rapidly, while the surface oxygen coverage is still high enough to provide ample species for target gas interaction.
Keywords: adsorption; indium tin oxide; semiconductor gas sensor.