Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is presented. The four beam suspensions are located at two sides of the mass aligned with edges of the mass, and the thickness of the beams is the same as the thickness of the mass block. In order to realize the multi-axis detection, a total of 16 sensing elements are distributed at the end of the folded beams. The structural deformations, stress distribution, and output characteristics due to the acceleration in x-, y-, and z-axis directions are theoretically analyzed and simulated. The proposed accelerometer is fabricated by MEMS processes to form Mo/AlN/ScAlN/Mo piezoelectric stacks as the sensing layer. Experiments show that the charge sensitivity along the x-, y-, and z-axes could reach up to ~1.07 pC/g, ~0.66 pC/g, and ~3.35 pC/g. The new structure can provide inspiration for the design of tri-axial piezoelectric accelerometers with great sensitivity and linearity.
Keywords: AlN/ScAlN thin film; MEMS; piezoelectric accelerometer; sensitivity.