Sensors based on capacitance detection are common in the field of inertial measurement and have the potential for miniaturization and low power consumption. In order to control and process such sensors, a novel digital-analog hybrid system-on-chip (SoC) is designed and implemented. The system includes a capacitor to voltage (C/V) conversion circuit and a band-pass sigma-delta modulator (BPSDM) as the analog-to-digital converter (ADC). The digital signal is processed by the dedicated circuit module based on the least mean square error demodulation (LMSD) algorithm on the chip. The low-power Cortex-M3 processor supports software implementation of control algorithms and circuit parameter configuration. The control signal is output through a digital BPSDM. The chip was taped out under SMIC 180 nm Complementary Metal Oxide Semiconductor (CMOS) technology and tested for performance. The result shows that the maximum operating frequency of the chip is 105 MHz. The total area is 77.43 mm2. When the system clock is set to 51.2 MHz, the static power consumption and dynamic power consumption of the digital system are 18 mW and 54 mW respectively.
Keywords: SoC; capacitive sensors; low power; miniaturization; signal processing.