In this paper, we reviewed the history of microelectrode arrays (MEAs), compared different microfabrication techniques applied to modern MEAs in terms of their material characters, device properties and application scenarios. Then we discussed the biocompatibility of different MEAs as well as corresponding strategy of improvement. At last, we analyzed the growing trend of MEAs' technical route, expected application of MEAs in the field of Electrical impedance tomography (EIT).
Keywords: EIT; Flexible electronics; In vitro; In vivo; MEAs.
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